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E539/439 VLSI Technology & Fabrication (Fall 08)

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More:  http://www.southalabama.edu/engineering/ece/faculty/akhan/Courses/teaching_activities.htm

How to access lectures slides? Lecture #1 The chip making process

Lecture # 2 CMOS process flow
Lecture # 3 Crystal structures

Homework-2

Lecture # 4 Crystal growth methods and wafers for VLSI devices
Homework-3 Lecture #5 Crystal growth methods and wafers for VLSI devices
Lecture #6 Clean room, wafer cleaning, and gettering
Lecture #7 Photolithography basics

Lecture #8 Advanced Photolithography (revised)
Lecture # 9 Photoresists

Projects topics

Lecture #10 Next generation lithography methods
soft interference lithography Lecture # 11 &12  basic concept of oxidation, and Deal Grove model

Lecture #13 Limitations of Deal Grove model and LOCOS
Lecture # 14 & 15  Dopant diffusion models and issues

Lecture #15 &16 Ion Implantation
Lecture 17 # Ion-implantation and TED
Lecture #18 Thin film deposition

Lecture #19  LPCVD and PECVD
Lecture #20 Sputtering
Lecture #21  Etching basics
Lecture #22  Plasma etching
Lecture #23 & 24 back-end-technology

Contamination Control In and Out of the Cleanroom: MEMS, NEMS and Contamination at the Atomic Scale

Chapter-5 Lithography (revised)

Microelectronic engineering

A2C2 magazine

Review of the course
IEEE transactions on semiconductor manufacturing (0894-6507)

University of South Alabama Print Holdings
 IEEE Electronic Library Online
IEEE transactions on very large scale integration (VLSI) systems  (1063-8210)

 University of South Alabama Print Holdings
 IEEE Electronic Library Online
Proceedings – Great Lakes Symposium on VLSI (1066-1395)

 ACM Digital Library

Photonics and Nanostructures – Fundamentals and Applications  (1569-4410)

 ScienceDirect Elsevier Science Journals

 

A recent article on Thermally actuated probe array for parallel dip-pen nanolithography

Source:

http://www.southalabama.edu/engineering/ece/faculty/akhan/Courses/EE539-439-fall08/EE539.htm

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